ISSN: 2754-4915 | Open Access

Journal of Material Sciences & Manufacturing Research

Current Issue Articles

Review Article DOI: doi.org/10.47363/JMSMR/2024(5)185

TEM Analysis and Failure Mechanism Studies of Bromine-Induced Defects in Wafer Fabrication

Author(s):

Younan Hua*,Binghai Liu, Lois Liao, Lei Zhu, Xiaodan Luo, Xiaomin Li and Chao Zhu

Published Date: 2024-09-05

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